Specification | E-MST-XY-110X110 |
Motor type and drive mode | 2-phase stepping motor + precision ball screw |
Screw lead | 2mm |
Travel | 110mm x 110mm |
Repeatability | ≤±1.5um |
positioning accuracy | ≤±5um(can be compensated to±2um) |
minimum step size | 0.1um |
Flatness [um] | ≤±4 |
Straightness [um] | ≤±2 |
Orthogonality [arcsec] | ≤±3 |
Maximum speed [mm/s] | ≥30 |
Maximum load [kg] | ≥10 |
Structural material and surface treatment | Aluminum alloy hard anodizing |